W3 Total Cache crashed my multisite (500 internal server error)

HELP! I am in trouble!

I installed W3 Total Cache on my multisite and activated it (inadvertently) network-wide. Now I have a 500 Internal server error on all pages

I deleted the plugin via ftp. But no change!

How can I do it retrogressive?

Thanks a lot for a hint or link to the solution.
CK

http://ww.wp.xz.cn/extend/plugins/w3-total-cache/